Browsing by Author "Pandit, Milind"
Now showing items 1-1 of 1
-
Experimental observation of temperature and pressure induced frequency fluctuations in silicon MEMS resonators
Pandit, Milind; Mustafazade, Arif; Sobreviela, Guillermo; Zhao, Chun; Zou, Xudong; Seshia A, Ashwin (IEEE, 2021)Silicon MEMS resonators are increasingly being adopted for applications in timing and frequency control, as well as precision sensing. It is well established that a key limitation to performance is associated with sensitivity ...